ũ
1.
ù
ù
CVD
(
C
hemical
V
apor
D
eposit)
ƮƿǶ(Trimethyl-silane) Լ ȭչ ̿ ȭ
CVR
(
C
hemical
V
apor
R
eaction)
ȭ Silicon (Graphite) ǥκ źҿ ȭ Ͽ ǥ SiCȭ Ű
2. Coating Ư¡
CVD (Chemical Vapor Deposition)
CVR (Chemical Vapor Reaction)
1. .
2. Graphite Coating Ȯϴ.
3. ȭ پ.
4. Coating β Ȯ .
5. Graphite Ҽ Coating ƴ.
(ǥ )
1. ġ ȭ .
2. 꼺 .
3. ϴ.
4. .
5. â .
6. , 뼺 .
7. ȭ ߰ .
8. ϴ.
1. ȭ ϱ ƴ.
2. ǥ ĥ.
3. 䱸ϴ ǰ ƴ.
4. 꼺 .
5. .
6. .
7. â ̷ Crack ִ.
8. ῡ Ұ ᰡ ִ.
1. ϴ.
2. CVD ȭ .
(ȭ Ͼ ƴ.)
3. Coating β Ȯ ƴ.
4. Graphite Ҽ ǥ ִ.
(ǥ )
5. Graphite .
6. ʴ Tool ڱ 巯 찡 ִ
̼(CVR)